Susceptor for use in production of a semiconductor



Fig. 1.1 is a Perspective view of a susceptor showing my new design;

Fig. 1.2 is a Front view of the susceptor of Fig. 1.1;

Fig. 1.3 is a Back view of the susceptor of Fig. 1.1;

Fig. 1.4 is a Left side view of the susceptor of Fig. 1.1;

Fig. 1.5 is a Right side view of the Susceptor of Fig. 1.1;

Fig. 1.6 is a Top yiew of the susceptor of Fig. 1.1;

Fig. 1.7 is a Bottom view of the susceptor of Fig. 1.1;

Fig. 1.8 is an Enlarged perspective view of the susceptor of Fig. 1.1;

Fig. 1.9 is an Enlarged view of the claimed portion of the susceptor ofFig. 1.1;

Fig. 1.10 is an End view of a pocket part of the susceptor of Fig. 1.1;

Fig. 1.11 is an End view of a pocket part of the susceptor of Fig. 1.1;

Fig. 1.12 is a Cross-sectional view ofthe susceptor of Fig. 1.1;

Fig. 1.13 is a Cross-sectional view of the susceptor of Fig. 1.1;

Fig. 1.14 is a Cross-sectional view of the susceptor of Fig. 1.1;

Fig. 1.15 is a Reference view of the susceptor of Fig. 1.1;

Fig. 1.16 is a Reference view showing the state of use of the susceptorof Fig. 1.1 with a wafer placed on a pocket part.

In the drawings, thin lines drawn on curved surfaces do not indicate anypatterns, but indicate the shapes of stereoscopic surfaces; the brokenlines in the figures are directed to environment and are forillustrative purposes only; the broken lines form no part of the claimeddesign; the chain lines depict only boundaries between the subjectmatter and the remaining parts of the claimed design.

CLAIM The ornamental design for a susceptor for use in production of asemiconductor, as shown and described.